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MPXM2010GS 数据表(PDF) 157 Page - Motorola, Inc |
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MPXM2010GS 数据表(HTML) 157 Page - Motorola, Inc |
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157 / 670 page ![]() 3–11 Motorola Sensor Device Data www.motorola.com/semiconductors Unibody Cross–sectional Drawings Figure 9. Cross–Sectional Diagrams (not to scale) SILICONE GEL DIE COAT WIRE BOND LEAD FRAME DIFFERENTIAL/GAUGE DIE STAINLESS STEEL METAL COVER EPOXY CASE DIFFERENTIAL/GAUGE ELEMENT DIE BOND SILICONE GEL DIE COAT WIRE BOND LEAD FRAME ABSOLUTE DIE STAINLESS STEEL METAL COVER EPOXY CASE DIE BOND ABSOLUTE ELEMENT P1 P2 P1 Figure 9 illustrates the absolute sensing configuration (right) and the differential or gauge configuration in the basic chip carrier (Case 344). A silicone gel isolates the die surface and wire bonds from harsh environments, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPX series pressure sensor operating characteristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term stability. Contact the factory for information regarding media compatibility in your application. Figure 10. Cross–Sectional Diagram (not to scale) FLUORO SILICONE DIE COAT WIRE BONDS LEAD FRAME DIE STAINLESS STEEL METAL COVER EPOXY CASE P1 Figure 10 illustrates the differential/gauge die in the basic chip carrier (Case 473). A silicone gel isolates the die surface and wirebonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. Freescale Semiconductor, Inc. For More Information On This Product, Go to: www.freescale.com |
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