FEATURES
❏ Improved bubble resistance and flow measurement
The conventional ultrasonic flowmeters used to have
difficulties in measuring fluids containing bubbles because
the bubbles disturb the propagation of ultrasound waves.
The FCA6000 series uses our unique, proven signal
processing technology, which makes it possible to measure
the flow even when the bubbles contain.
Furthermore, by detecting and removing abnormal outputs
based on our extensive field experience, bubble resistance
has been greatly improved, as well as measurement stability
of the flowmeter.
❏ Enhanced safety and freedom in layout
The flow detector and the control valve in the process
fluid part are separated from the measurement and
control part, ensuring enhanced protection against liquid
leakage as well as greater freedom in layout.
❏ Support for a wide flow range
The FCA6000 series covers a wide range of flow rate, from a
minimum of 2.5 to 25 mL/min up to 1 to 10 L/min.
❏ Low power consumption
The FCA6000 series consumes less current than existing
converters.
❏ CE marking
Complies with EU EMC, RoHS2, and low voltage requirements
(EMC standards: EN61326-1:2013, EN61326-2-3:2013)
❏ High corrosion resistance
The UCUF series uses highly corrosion resistant PFA and
PTFE for the wetted parts and can be used to handle
chemical liquids in the semiconductor and other industries.
MAIN APPLICATIONS
❏ Flow rate setting for chemical liquids and DIW
By installing the FCA6000 series in the supply line for various
chemical liquids, which was previously controlled by a
metering pump or pressure feed tank, high accurate and
stable supply control is possible.
❏ Concentration control
The control units installed in chemical liquid and pure water
lines enable stable concentration management when diluting
the chemical liquids with pure water to keep the
concentration at a certain level.
❏ Flow control of branch lines
The control units installed in each line branched from the
main line enable a stable flow rate to be maintained without
mutual interference between the lines.