84FS datasheet(2/3 Pages) HP

2 / 3 page

Ordering Information

Pumps

Configuration Options

TwisTorr 84 FS ISO 63

X3502-64000

TwisTorr 84 FS KF 40

X3502-64001

TwisTorr 84 FS CFF 4.5”

X3502-64002

TwisTorr 84 FS CFF 2.75”

X3502-64003

Controllers

Part Numbers

TwisTorr 84 FS AG Rack controller RS232/485

X3508-64001

TwisTorr 84 FS AG Rack controller Profibus

X3508-64002

TwisTorr 84 FS onboard controller 110/220V

X3509-64000

TwisTorr 84 FS onboard controller 24V

X3509-64001

TwisTorr 84 FS PCB Controller

X3510-64000

Cables

Part Numbers

Mains cable NEMA plug 3 m long

9699958

Mains cable EU plug 3 m long

9699957

Serial cable and T-plus software

9699883

PCB cable

9699869

Pump extension cable (3 m)

9699942

Extension cable

969-9942M007 (

5 m)

969-9942M006 (

10 m)

969-9942M005 (

15 m)

969-9942M004 (

20 m)

Inlet Screen

Part Numbers

Inlet screen ISO 63

X3502-68001

Inlet screen CFF 4.5”

X3502-68000

Inlet screen, KF 40

969-9309

Inlet screen CFF 2.75”

969-9328

Cooling

Part Numbers

Metal water cooling kit

X3502-68002

Plastic water cooling kit

X3502-68003

Metal water cooling kit

X3502-68002

Plastic water cooling kit

X3502-68003

Air cooling kit (0,5 m cable)

9699290

Air cooling kit extension cable (5 m)

9699940

Vibration isolator

Part Numbers

Vibration isolator ISO

63 969-9375

Vibration isolator CFF 4.5”

969-9376

Venting

Part Numbers

Vent Valve N.O. 0.5 mm orifice (0.5 m cable)

9699844

Vent Valve extension cable

9699941 (5 m)

969-9941M003 (10 m)

969-9941M001 (15 m)

969-9941M005 (20 m)

Vent Screw M5

X3502-68005

Vent Adapter kit M5-M8

X1699-64039

Purge

Part Numbers

Purge Screw

X3502-68004

Purge valve 10 SCCM NW16KF - M12

9699834

Purge valve 10 SCCM ¼ Swagelok - M12

9699108

Purge valve 20 SCCM NW16KF - M12

969-9241

Purge valve 20 SCCM ¼ Swagelok - M12

969-9242

Purge valve 10 SCCM ¼ Swagelok - ¼ Swagelok

969-9232

Purge valve 20 SCCM ¼ Swagelok - ¼ Swagelok

969-9236

Mounting

Part Numbers

Controller side mounting bracket

X3502-68006

CFF4.5 Mounting kit

X3502-68007

Metric screws kit

X3502-68008

American screws kit

X3502-68009

Active Gauges

Part Numbers

FRG 700 Full Range Gauge

PVG 500 Pirani Vacuum Gauge

PCG 750 Pirani Capacitance Gauge

CDG-500 Capacitance Diaphragm Gauge

Ask Agilent for details

Pumping Speed

Compression Ratio

Technical Specification

Pumping speed

KF40

CFF 2.75”

ISO 63

CFF 4.5”

49 L/s

38 L/s

36 L/s

56 L/s

46 L/s

40 L/s

57 L/s

67 L/s

63 L/s

53 L/s

66 L/s

Gas throughput at full

rotational speed

(with recomm. forepump)

Air cooling (35 °C)

Water cooling

(25 °C, 65 L/h)

100 sccm

70 sccm

100 sccm

70 sccm

Compression ratio and foreline tolerance

≥ 1.0 x 1011

2.0 x 106

5.0 x 104

> 1.0 x 1011

>14 mbar

>12 mbar

>4 mbar

>14 mbar

Base pressure with recom-

mended forepump (5 m3/h)

< 5 x 10-10 mbar (< 3.75 x 10-10 Torr)

Inlet flange

CFF 4.5” od

CFF 2.75” od

ISO 63

KF 40

Foreline flange

KF16 NW

Rotational speed

81000 rpm (1350 Hz driving frequency)

Start-up time

< 2 minutes

Technical Specification

Recommended forepump

mechanical: Agilent DS 40M / DS 102

dry pump: Agilent IDP-3/IDP-7

Operating position

Any

Oper. ambient temperature

+5 °C to +35 °C

Rel. humidity of air

0 - 90 % (not condensing)

Bakeout temperature

80 °C for ISO (120 °C for CFF) at inlet flange

Lubricant

Permanent lubrication

Cooling requirements

Forced air (5- 35 °C ambient temperature)

Air cooling

Air flow temperature +5° C to +35 °C

Water cooling

Cooling water temperature: +15 °C to +25 °C

Minimum flow: 65 L/h (0.30 GPM)

Pressure: 2 to 4 bar (45 to 75 psi)

Noise Pressure level

(at 1 mt at full speed)

40 dB(A) *

Storage temperature

-40 °C to +70 °C

Max altitude

3000 m

Weight kg (lbs)

Pump ISO 63 kg 2.05

Pump CFF 4.5” kg 3.50

Pump CFF 2.75” kg 3.34

Pump KF 40” kg 2.37

Conformity to norms

CE, C-CSA-US, RoHS

compliant as per 2011/65/UE

Outline Drawing

Technical Specification

FORELINE

FLANGE KF16

ELECTRICAL

CONNECTOR

VENT

SCREW

ISO 63K

CFF 4"1/2

FORELINE

FLANGE KF16

VENT

SCREW

ELECTRICAL

CONNECTOR

97 [3.82]

59.25 [2.3

62.4 [2.4

59.25 [2.3

62.4 [2.4

97 [3.82]

*average value ± 4 dB(A) std deviation

Inlet Pressure (mbar)

1,E-09

1,E-08

1,E-07

1,E-06

1,E-05

1,E-04

1,E-03

1,E-02

1,E-01

1,E+00

Hydrogen

Helium

Nitrogen

Argon

Foreline Pressure (mbar)

1,E+00

1,E+01

1,E+02

1,E+03

1,E+04

1,E+05

1,E+06

1,E+07

1,E+08

1,E+09

1,E+10

1,E+11

1,E+12

1,E-3

1,E-2

1,E-1

1,E+0

1,E+1

1,E+2

Hydrogen

Helium

Nitrogen

Argon

3D Drawings available for download

84FS 数据表(PDF) 2 Page - Agilent(Hewlett-Packard)

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