Y-axis CNC table (100 mm)

E-AT-S105A

Travel

100 mm

Max. travel speed

50 mm/s

Positioning accuracy

20 μm

Max. load

30 kg

Weight

Approx. 19 kg

Y-axis CNC table (200 mm)

E-AT-S106A

Travel

200 mm

Max. travel speed

50 mm/s

Positioning accuracy

20 μm

Max. load

30 kg

Weight

Approx. 22 kg

θ-axis CNC table (Horizontal)

E-AT-S107A

Travel

360°

Max. travel speed

20°/sec

Positioning accuracy

0.03°

Max. load

15 kg

Weight

Approx. 2.5 kg

θ-axis CNC table (Vertical)

E-AT-S108A

Travel

360°

Max. travel speed

20°/sec

Positioning accuracy

0.03°

Max. load

5 kg

Weight

Approx. 3.2 kg

Auto-Leveling Table Option

Allows auto leveling when used in combination with a SURFCOM series instrument. Eliminates the need for surface tilt adjustment.

1-axis auto leveling table

E-AT-S72A

Leveling range

±1°

Max. load

5 kg

Weight

3 kg

2-axes auto leveling table

E-AT-S62A

Leveling range

X-axis: 1°, Y-axis: 1°

Max. load

10 kg

Weight

4 kg

Expand functions.

Combine options.

Proposal of user customization

for improved efficiency

CNC Table Option

1. The standard measuring system (S1500, C1700, C1710, C2700, S1900,

S1910, S2900, S2000 S1400G, C1600G, S1800G, S2800G Series) can

be automated by adding a CNC table unit.

2. CNC table control, and simplified teaching and playback can be performed

from the integrated measuring software.

3. The Y-axis table and rotary table can be rearranged as needed in order to

configure the system to suit the workpiece.

Example of Y-axis CNC table (100 mm) and

θ-axis CNC table (horizontal) combination

Measuring range (Z)

300 μm

Resolution (Z)

10 nm

Max. measuring angle

30°*

Spot diameter

2 μm

Workpiece distance

4.5 mm

Detection principle

Color confocal system

Light source

White light

Supported systems

S480B, S1400G,

S1500DX3/SD3,

S1800G, S2800G,

S2000DX3/SD3,

S1900DX3/SD3,

S2900DX3/SD3,

S1910DX3/SD3

Detection

principle

Light source

Monochrometer

Focus blue

Focus red

Object being measured

Fiber link

Collimator

Measuring range

Focus blue

Focus red

Optical fiber

* Requires separate controller.

Non-Contact Roughness Pickup Option

In combination with a SURFCOM series instrument, the pickup provides surface texture measuring of plastic, film, paper, and other

soft objects.

* Depends on workpiece reflectance, material, and color.

Surface Texture – Contour

Measuring Instruments

Application

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TOKYO SEIMITSU