DFD6560 datasheet(2/2 Pages) DISCO

2 / 2 page

2016.11

Fully Automatic Dicing Saw

DFD6560

Specifications

プリアライメントステージ

スピンナテーブル

ロアアーム

アッパーアーム

門型構造

チャック

テーブル

カセット

エレベータ

DFD6560 operation flow

[1] Push-pull arm moves the workpiece from the cassette to the pre-

alignment stage

[2] After centering at the pre-alignment stage, the lower arm moves the

workpiece to the chuck table.

[3] Cutting

[4] Upper arm moves the workpiece to the spinner table

[5] Cleaning and drying – Lower arm moves the workpiece to the pre-

alignment stage

[6] Push-pull arm returns the workpiece to the cassette.

Environmental Conditions

• Use clean, oil-free air (dew point between -10 - -20 , residual oil: 0.1 ppm, and filtration rating: 0.01µm/99.5 % or more).

• Keep room temperature fluctuations within ±1℃ of the set value. (Set value should be between 20 - 25 ℃).

• Keep cutting water and cleaning water 2 ℃ above room temperature (fluctuations within ±1 ℃).

• The machines should be used in an environment, free from external vibration. Do not install machine near a ventilation opening, heat generation equipment or oil mist generating parts.

• This machine uses water. In case of water leakage, please install the machine on the floor with sufficient waterproofing and drainage treatments..

* As the above specification may change due to technical modifications.

Please confirm when placing your order.

* For further information, please contact your local sales representative.

www.disco.co.jp

Unit

1.8 kW

High speed

(option)

Cutting range

Cutting speed

mm/sec

Cutting range

Index step

Max. stroke

Moving resolution

Repeatability accuracy

θ-axis Max. rotating angle

deg

Rated torque

N・m

0.29

0.19

1,240 × 1,550

× 1,960

81mm convex

（left side）

20,000 - 80,000

Machine weight

Approx. 1,640

Revolution speed range

Machine dimensions(W×D×H)

Spindle

min

-1

6,000 - 60,000

Z-axis

0.00005

0.001

380

Specification

φ300

X-axis

310

0.1 - 1,000

Workpiece size

Y1･Y2

-axis

310

0.0001

14.2(For φ2″blade)

0.002/310

(Single error)0.002/5

Index positioning accuracy

DFD6560 数据表(PDF) 2 Page - DISCO Corporation

DFD6560 数据表(HTML) 2 Page - DISCO Corporation

Html Pages

1 2

数据表下载

链接网址

DFD6560 数据表(PDF) 2 Page - DISCO Corporation

DFD6560 数据表(HTML) 2 Page - DISCO Corporation

Html Pages

1 2

数据表 下载

链接网址

数据表下载