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DFG8640 数据表(PDF) 2 Page - DISCO Corporation

部件名 DFG8640
功能描述  Fully Automatic Grinder
PDF  2 Pages
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制造商  DISCO [DISCO Corporation]
网页  https://www.disco.co.jp
标志 DISCO - DISCO Corporation

DFG8640 数据表(HTML) 2 Page - DISCO Corporation

  DFG8640 Datasheet HTML 1Page - DISCO Corporation DFG8640 Datasheet HTML 2Page - DISCO Corporation  
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Fully Automatic Grinder
DFG8640
Specifications
Environmental conditions
• Use clean, oil-free air at a dew point of -15°C or less. (Residual oil: 0.1 ppm. Filtration rating: 0.01 µm / 99.5% or more).
• Keep room temperature within ±1°C of the specified value. (Specified value should be between 20 – 25°C.)
• Keep grinding water 0 – 2°C above room temperature (fluctuations within 1°C over one hour).
• Keep spindle cooling water temperature between 20 and 25°C (fluctuations within 2°C over one hour).
• Machines should be used in an environment free from external vibration. Do not install machines near a ventilation opening, heat generating equipment, or oil mist generating parts.
• This machine uses water. Due to the risk of water leakage, please install the machine on a floor with sufficient waterproofing and drainage measures.
*All the pressures are described using gauge pressure.
*The above specifications may change due to technical modifications. Please confirm when placing your order.
*For further information please contact your local sales representatives.
2018.12
www.disco.co.jp
Specification
Unit
DFG8640
Wafer diameter
-
ø8”
Grinding method
-
In-feed grinding with wafer
rotation
Grinding wheel
mm
ø8”
Spindle
Rated output
kW
6
Revolution speed
min-1
1,000
– 7,000
Machine dimensions (W x D x H)
mm
1,000 x 2,800 x 1,800
Machine weight
kg
3,500
Specifications
[1] The robot pick removes the
workpiece from the cassette and
places it on the positioning table,
where centering takes place.
[2] Transfer arm 1 positions the
workpiece on the chuck table.
[3] The workpieces are ground at Z1
and Z2.
[4] Transfer arm 2 removes the
workpiece from the chuck table and
positions it on the spinner table.
[5] Cleaning and drying
[6] The robot pick returns the
workpiece to the cassette.



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