Performance

Full Scale Flow Ranges (N

5 - 50000 sccm

(consult factory for available flow ranges)

Maximum Inlet Pressure

150 psig

(cannot exceed pressure differential requirement across MFC)

normal Operating Pressure differential (N

10to5000sccm;10to40psid

(with atmospheric pressure at the MFC outlet)

10000to20000sccm;15to40psid

30000to50000sccm;25to40psid

Proof Pressure

1000 psig

Burst Pressure

1500 psig

Control Range

2% to 100% of F.S. (range on mech.)

Typical accuracy

± 1% of set point for 20 to 100% F.S.

± 0.2% of F.S. for 2 to 20% F.S.

Repeatability

± 0.3% of Reading

Resolution

0.1% of Full Scale

Temperature Coefficients

Zero

< 0.05% of F.S./°C

Span

< 0.08% of Rdg./°C

Inlet Pressure Coefficient

< 0.02% of Rdg./psi

Typical Controller Settling Time

< 750 msec., typical above 5% F.S.

(per SEMI Guideline E-17-0600)

warm-up Time

< 30 min

(to within 0.2% of F.S. of steady state performance)

Operating Temperature Range (ambient)

10°C to 50°C

Storage Humidity

0 to 95% relative humidity, non-condensing

Storage Temperature

-20° to 80°C (-4° to 149° F)

Pressure display

0 to 100 psia

Pressure Readout Units

psia, kPA

Pressure accuracy

1% F.S.

Pressure Resolution

0.1 psia

Temperature display

0 to 100°C

Temperature Readout Units

°C

Temperature accuracy

± 2°C

Temperature Resolution

0.1°C

attitude Insensitivity

0.25% of FS for indicated zero, span and actual span

Pressure Transient (Inlet/Outlet Pressure Sensitivity)

±5% of set point from 20 to 100% of FS when subject to a 2 psi inlet

pressure transient

Mechanical

Fittings (compatible with)

display

4 digits for value, 4 characters for unit

leak Integrity

External (scc/sec He)

Through closed valve

< 1.0% of F.S. at 25 psig inlet to atmosphere (range on mech.)

(To assure no flow-through, a separate positive shut-off valve is required.)

wetted Materials

Standard

316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality),

316 S.S., Elgiloy, KM-45

Valve Seat

PTFE (Teflon)

Surface Finish

10µ inch average Ra

weight

less than 3 lbs (1.4kg)

Electrical analog I/O

Input Power Required

+15 to +24 VDC @ 350mA max

Flow Input/Output Signal

0 to 5 VDC

Output Impedance

< 1

Ω

Connector

15-pin Type “D” Male, 9 pin Type “D” Male

Compliance

CE