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Datasheet ESRF-ESF

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State of the art performance due to MEMS resistive technology

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High accuracy and resolution

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<±1.25% RD Total Error Band

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Wide dynamic range

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Bidirectional Flow Measurement

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Gas Flow sensor: up to ±300 ln/min

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Calibrated & temperature compensated analog or digital output

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Excellent long term stability

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Low temperature drift

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Compact size

Typical Applications

Medical

Ventilation • Anesthesia • Inspiratory flow sensing • Gas mixing • Respiratory measurements •

Drug delivery • Expiratory flow measurement • Metabolic Measurements • Proximal Flow

measurement • Proximal flow measurement for infants / neonates • Expiratory flow

measurement for infants / neonates • Ventilation & Anesthesia for infants / neonates •

Respiratory measurements for infants / neonates • Metabolic Measurements for infants /

neonates • Oxygen concentrators and conservers • Respirators and ventilators • Nebulizers •

Continuous positive airway pressure (CPAP) • Anesthesia machines • Anesthesia delivery

machines, ventilators • ventricular assist devices (heart pumps), spirometers • laparoscopy

Industrial

Mass flow controllers (Telecommunication systems, Environmental climate controls, Fuel cell

controls, Process gas control welding equipment and lasers) • Analytic instrumentation

(spectrometry, chromatography) • Air-to-fuel ratio • Fuel cells • Fume hoods • Gas leak

detection • Process control gas monitoring • Vacuum pump monitoring • Clogging detection •

Flow measurement • Air volume measurement • Process automation • Burner control •

Environment monitoring • Laboratory

Product Summary

ES Systems has developed ESRF-ESF, an inline gas flow sensor, based on the hot-film

anemometer principle for mass gas flow measurements.

ESRF-ESF is one of the few gas flow sensors featuring bidirectional gas flow sensing of up to

±300 ln/min with a total error band of <±1.25% RD. ESRF-ESF gas flow sensors provide

them plug & play for direct interfacing to low voltage MCUs and systems. The user is provided

with a multitude of interface and output options so that the right sensor configuration can be

selected based on the specific requirements for each application.

Calibration gas is air but other non-aggressive gases are available upon request.

Resistive MEMS Gas Flow Sensor