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MPX53DP 数据表(PDF) 4 Page - Freescale Semiconductor, Inc |
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MPX53DP 数据表(HTML) 4 Page - Freescale Semiconductor, Inc |
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4 / 9 page ![]() MPX53 Sensors 4 Freescale Semiconductor TEMPERATURE COMPENSATION Figure 2 shows the typical output characteristics of the MPX53/MPXV53GC series over temperature. The piezoresistive pressure sensor element is a semiconductor device which gives an electrical output signal proportional to the pressure applied to the device. This device uses a unique transverse voltage diffused semiconductor strain gauge which is sensitive to stresses produced in a thin silicon diaphragm by the applied pressure. Because this strain gauge is an integral part of the silicon diaphragm, there are no temperature effects due to differences in the thermal expansion of the strain gauge and the diaphragm, as are often encountered in bonded strain gauge pressure sensors. However, the properties of the strain gauge itself are temperature dependent, requiring that the device be temperature compensated if it is to be used over an extensive temperature range. Temperature compensation and offset calibration can be achieved rather simply with additional resistive components, or by designing your system using the MPX2053 series sensors. Several approaches to external temperature compensation over both –40 to +125°C and 0 to +80°C ranges are presented in Freescale Application Note AN840. Figure 2. Output vs. Pressure Differential LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range (see Figure 3). There are two basic methods for calculating nonlinearity: (1) end point straight line fit or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Freescale’s specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. Figure 3. Linearity Specification Comparison 100 01 2 3 4 5 6 7 8 10 20 30 40 50 PSI kPa 0 Pressure Differential 90 80 70 60 50 40 30 20 10 0 Span Range (Typ) +125×C +25°C MPX53 VS = 3 Vdc P1 > P2 –40°C Offset (Typ) Offset (VOFF) 70 60 50 40 30 20 10 0 0MAX POP Span (VFSS) Pressure (kPA) Actual Theoretical Linearity 90 80 |
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