MPXM2010

Rev 4, 09/2005

Freescale Semiconductor

Technical Data

© Freescale Semiconductor, Inc., 2005. All rights reserved.

10 kPa On-Chip Temperature

Compensated & Calibrated

Silicon Pressure Sensors

The MPXM2010 device is a silicon piezoresistive pressure sensor providing a

highly accurate and linear voltage output – directly proportional to the applied

pressure. The sensor is a single, monolithic silicon diaphragm with the strain

gauge and a thin-film resistor network integrated on-chip. The chip is laser

trimmed for precise span and offset calibration and temperature compensation.

Features

•

Temperature Compensated Over 0

°C to +85°C

•

Available in Easy-to-Use Tape & Reel

•

Ratiometric to Supply Voltage

•

Gauge Ported & Non Ported Options

Application Examples

•

Respiratory Diagnostics

•

Air Movement Control

•

Controllers

•

Pressure Switching

pressure sensor chip.

ORDERING INFORMATION

Device Type/Order No.

Options

Case No.

MPXM2010D

Non-ported

1320

MPXM2010DT1

Non-ported, Tape and Reel

1320

MPXM2010GS

Ported

1320A

MPXM2010GST1

Ported, Tape and Reel

1320A

MPXM2010

SERIES

FREESCALE PREFERRED

DEVICE

0 to 10 kPa (0 to 1.45 psi)

25 mV FULL SCALE SPAN

(TYPICAL)

PIN NUMBERS

1

GND

3

2

4

MPXM2010D/DT1

CASE 1320-02

MPXM2010GS/GST1

CASE 1320A-02

Sensing

Element

3

1

GND

2

4

Thin Film

Temperature

Compensation

and

Calibration

Circuitry

Figure 1. Fully Integrated Pressure Sensor Schematic