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LIS3L02AS 数据表(PDF) 3 Page - STMicroelectronics |
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LIS3L02AS 数据表(HTML) 3 Page - STMicroelectronics |
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3 / 7 page ![]() 3/7 LIS3L02AS ELECTRICAL CHARACTERISTCS (Temperature range -40°C to +85°C) 1 FUNCTIONALITY 1.1 Sensing element The THELMA process is utilized to create a surface micro-machined accelerometer. The technology al- lows to carry out suspended silicon structures which are attached to the substrate in a few points called anchors and free to move on a plane parallel to the substrate itself. To be compatible with the traditional packaging techniques a cap is placed on top of the sensing element to avoid blocking the moving parts during the molding phase. The equivalent circuit for the sensing element is shown in the below figure; when a linear acceleration is applied, the proof mass displaces from its nominal position, causing an imbalance in the capacitive half- bridge. This imbalance is measured using charge integration in response to a voltage pulse applied to the sense capacitor. The nominal value of the capacitors, at steady state, is few pF and when an acceleration is applied the maximum variation of the capacitive load is few tenth of pF. Symbol Parameter Test Condition Min. Typ. Max. Unit Vdd Supply voltage 3 5.25 V Idd Supply current 1.0 mA Voff Zero-g level T = 25°C ratiometric to Vdd Vdd/2-10% Vdd/2 Vdd/2+10% V Ar Acceleration range 0V on FS pin ±1.8 ±2.0 ±2.2 g Vdd on FS pin ± ±6.0 g So Sensitivity ratiometric to Vdd T = 25°C Full-scale = 2g Vdd/5–10% Vdd/5 Vdd/5+10% V/g T = 25°C Full-scale = 6g Vdd/15–10% Vdd/15 Vdd/15+10% V/g NL Non Linearity Best fit straight line X, Y axis Full-scale = 2g ±0.3 % Best fit straight line Z axis Full-scale = 2g ±0.6 % fuc Sensing Element Resonant Frequency X, Y axis 4.0 KHz Z axis 2.5 KHz an Acceleration noise density Vdd=5V Full-scale = 2g 100 µg/ Vt Self test output voltage Ratiometric to Vdd T = 25°C @ 5V TBD V Vst Self test input Logic 0 level 0 0.8 V Logic 1 level 2.8 Vdd V Rout Output impedance 100 k Ω Cload Capacitive load drive 320 pF Hz |
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