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LIS3L02AS 数据表(PDF) 3 Page - STMicroelectronics

部件名 LIS3L02AS
功能描述  INERTIAL SENSOR: 3Axis - 2g/6g LINEAR ACCELEROMETER
PDF  7 Pages
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制造商  STMICROELECTRONICS [STMicroelectronics]
网页  http://www.st.com
标志 STMICROELECTRONICS - STMicroelectronics

LIS3L02AS 数据表(HTML) 3 Page - STMicroelectronics

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LIS3L02AS
ELECTRICAL CHARACTERISTCS (Temperature range -40°C to +85°C)
1
FUNCTIONALITY
1.1 Sensing element
The THELMA process is utilized to create a surface micro-machined accelerometer. The technology al-
lows to carry out suspended silicon structures which are attached to the substrate in a few points called
anchors and free to move on a plane parallel to the substrate itself. To be compatible with the traditional
packaging techniques a cap is placed on top of the sensing element to avoid blocking the moving parts
during the molding phase.
The equivalent circuit for the sensing element is shown in the below figure; when a linear acceleration is
applied, the proof mass displaces from its nominal position, causing an imbalance in the capacitive half-
bridge. This imbalance is measured using charge integration in response to a voltage pulse applied to the
sense capacitor.
The nominal value of the capacitors, at steady state, is few pF and when an acceleration is applied the
maximum variation of the capacitive load is few tenth of pF.
Symbol
Parameter
Test Condition
Min.
Typ.
Max.
Unit
Vdd
Supply voltage
3
5.25
V
Idd
Supply current
1.0
mA
Voff
Zero-g level
T = 25°C
ratiometric to Vdd
Vdd/2-10%
Vdd/2
Vdd/2+10%
V
Ar
Acceleration range
0V on FS pin
±1.8
±2.0
±2.2
g
Vdd on FS pin
±
±6.0
g
So
Sensitivity ratiometric to Vdd
T = 25°C
Full-scale = 2g
Vdd/5–10%
Vdd/5
Vdd/5+10%
V/g
T = 25°C
Full-scale = 6g
Vdd/15–10%
Vdd/15
Vdd/15+10%
V/g
NL
Non Linearity
Best fit straight line
X, Y axis
Full-scale = 2g
±0.3
%
Best fit straight line
Z axis
Full-scale = 2g
±0.6
%
fuc
Sensing Element Resonant
Frequency
X, Y axis
4.0
KHz
Z axis
2.5
KHz
an
Acceleration noise density
Vdd=5V
Full-scale = 2g
100
µg/
Vt
Self test output voltage
Ratiometric to Vdd
T = 25°C
@ 5V
TBD
V
Vst
Self test input
Logic 0 level
0
0.8
V
Logic 1 level
2.8
Vdd
V
Rout
Output impedance
100
k
Cload
Capacitive load drive
320
pF
Hz



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