1

Motorola Sensor Device Data

Silicon Pressure Sensor

On-Chip Temperature

Compensated and Calibrated

The MPXT2010 Series silicon piezoresistive pressure sensors provide a very accurate

and linear voltage output — directly proportional to the applied pressure. These sensors

house a single monolithic silicon die with the strain gauge and thin–film resistor network

integrated on each chip. The sensor is laser trimmed for precise span and offset, both

calibrated and temperature compensated.

Features

• Stress Isolated Top Piston Fit Package

• Gauge Pressure Measurement

• Temperature Compensated over 0° to +85°C

• Unique Silicon Shear Stress Strain Gauge

• Ratiometric to Supply Voltage

• Available in Unibody Package (Case 344), See MPX2010 Series Data Sheet

Application Examples

• Respiratory Diagnostic Devices and Systems

• Air Movement Control (HVAC)

• Level Indicators

• Controllers

• Pressure Switching

Figure 1. Calibrated and Temperature Compensated

Pressure Sensor Schematic

VS

3

X–ducer

SENSING

ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

CALIBRATION

CIRCUITRY

2

4

Vout+

Vout–

1

GND

Senseon and X–ducer are trademarks of Motorola, Inc.

Order this document

by MPXT2010/D

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

MPXT2010

SERIES

COMPENSATED

PRESSURE SENSOR

0 to 10 kPa (0 to 1.45 psi)

FULL SCALE SPAN: 25 mV

PIN NUMBER

NOTE: Pins 5, 6, 7, and 8 are not

device connections. Do not connect

to external circuitry or ground. Pin 1

is noted by the notch in the Lead.

BASIC ELEMENT

CASE 473A–01

1

2

3

Gnd

+Vout

VS

5

6

7

N/C

N/C

N/C

4–Vout

8

N/C

REV 1