FS1012 Datasheet

© 2017 Integrated Device Technology, Inc.

4

July 20, 2017

Symbol

Parameter

Conditions

Minimum

Typical

Maximum

Units

Standard Gas Flow Range[b], [c]

Gas Flow

FS1012-1020-NG

0

2

(2000)

SLPM

(SCCM)

FS1012-1100-NG

0

10

(10000)

SLPM

(SCCM)

Standard Liquid Flow Range[b], [c]

Liquid Flow

FS1012-1001-LQ

0

0.5

(500)

SLPM

(SCCM)

FS1012-1002-LQ

0

1.0

(1000)

SLPM

(SCCM)

[a] Sensor specifications are tested at the wafer die level.

[b] SLPM: Standard liter per minute.

[c] SCCM: Standard cubic centimeter per minute.