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Fully Automatic Dicing Saw

DFD6340

DFD6340 Operation flow

[1]

Lower arm moves the workpiece from the cassette to the pre-alignment

[2]

Upper arm moves the workpiece to the spinner table

[3]

Lower arm returns the workpiece to the cassette

2014.11

Upper arm

Lower arm

Spinner table

Bridge-type frame

structure

Chuck table

Pre-alignment

stage

Cassette

elevator

[1]

[2]

[3]

Process stability - cutting water

flow control



Cutting water flow is controlled by the recipe.



Water flow is consistently maintained, aiding

process stability.

Easy operation

The DFD6340 utilizes an adjustable LCD touch

screen graphical user interface making operation

and maintenance intuitive and easy. The inclusion

of an inspection stage allows for the removal and

checking of wafers after dicing during fully

automatic operation.

Specifications

Environmental Conditions

• Use clean, oil-free air (dew point between -10 - -20 , residual oil: 0.1 ppm, and filtration rating:

0.01μm/99.5 % or more).

• Keep room temperature fluctuations within ±1℃ of the set value. (Set value should be between 20 -

25 ℃).

• Keep cutting water and cleaning water 2 ℃ above room temperature (fluctuations within ±1 ℃).

• The machines should be used in an environment, free from external vibration. Do not install machine

near a ventilation opening, heat generation equipment or oil mist generating parts.

• This machine uses water. In case of water leakage, please install the machine on the floor with

sufficient waterproofing and drainage treatments.

* All pressures specified above are gauge pressures.

* As the above specification may change due to technical modifications.

Please confirm when placing your order.

* For further information, please contact your local sales representative.

LCD touch screen

Adjustable LCD

Unit

1.2, 1.8 kW

2.2 kW

-

Cutting rangemm

Cutting speed

mm/sec

Cutting rangemm

Index step

mm

Index positioning

accuracy

mm

Max. stroke

mm

19.22

(For φ2″blade)

19.9

(For φ3″blade)

Moving

mm

Repeatability

accuracy

mm

θ-axis

Max. rotating

angle

deg

Rated torque

N・m

0.19(1.2 kW)

0.29(1.8 kW)

0.7

Revolution speed

range

min

-1

6,000 - 60,000

3,000 - 30,000

mm

kg

Z-axis

0.003/210

(Single error)0.002/5

0.00005

Machine weight

Y1･Y2

-axis

Machine

dimensions (W×D×H)

210

0.0001

0.001

Approx.1,600

1,180 × 1,110 × 1,850

380

Specification

φ

8″

X-axis

210

0.1 - 600

Workpiece size

Spindle