FS1012 Datasheet

© 2018 Integrated Device Technology, Inc.

4

November 19, 2018

Symbol

Parameter

Conditions

Minimum

Typical

Maximum

Units

Standard Gas Flow Range[b], [c]

Gas Flow

FS1012-1020-NG

0

2

(2000)

SLPM

(SCCM)

FS1012-1100-NG

0

10

(10000)

SLPM

(SCCM)

Standard Liquid Flow Range[b], [c]

Liquid Flow

FS1012-1001-LQ

0

0.5

(500)

SLPM

(SCCM)

FS1012-1002-LQ

0

1.0

(1000)

SLPM

(SCCM)

[a] Sensor specifications are tested at the wafer die level.

[b] SLPM: Standard liter per minute.

[c] SCCM: Standard cubic centimeter per minute.

Flow Curves

The flow output curves are typical values at room conditions. The heater voltage is set at 5VDC. Flow input is from P1 to P2 out.

In general, use TP1 to measure gas flow and TP2 for liquid flow.

Figure 4. FS1012-1020-NG Flow Curve