Gas and Liquid Flow Sensor Module

FS1012

Datasheet

© 2018 Integrated Device Technology, Inc.

1

November 19, 2018

Description

The FS1012 MEMS mass flow sensor module measures the flow

rate using the thermo-transfer (calorimetric) principle. The FS1012

is capable of measuring a gas or liquid medium.

The FS1012 offers key advantages over resistor-based flow

solutions. The sensor utilizes thermopile sensing, which provides

an excellent signal-to-noise ratio. The sensor comprises a “solid”

thermal isolation technology and silicon-carbide coating to protect

it from abrasive wear and provides robustness and long-term

reliability. In comparison, other sensors typically contain a fragile

membrane above an etched cavity for the thermal isolation base.

The FS1012 features the sensor fully assembled and wire-bonded

out to a 6-pin header. Wetted materials consist of a glass fiber

reinforced PA66 resin, epoxy, and silicon carbide.

Typical Applications



Process controls and monitoring



Oil and gas leak detection



HVAC and air control systems



CPAP and respiratory devices



Liquid dispensing system

Basic Application Circuits

Figure 1. Single-Ended Circuit Example

HTR1

HTR2

+

–

+

Microcontroller/ASIC

Input Offset Adjustment

Gain: 20X to 100x

Flow Sensor

GND

3V to 5V

TP1+

TP1–

SPI

ADC

PWM

OFFSET

–

Features



Gas or liquid mediums



Robust “solid” isolation technology



Resistant to surface contamination



No cavity to cause clogging



Resistant to vibration and pressure shock



Low power application



Sensitive at low flow rates and differential pressure levels



Fast response: <5ms



Millivolt output



Supply voltage: 3V to 5V



Module operating temperature range: 0°C to +85°C

FS1012 Flow Sensor Module

Figure 2. Differential Circuit Example

HTR1

HTR2

SPI

ADC

PWM

+

–

+

–

+

Microcontroller/ASIC

Differential Amp

Gain: 20X to 100x

–

Flow Sensor

GND

3V to 5V

TP1+

TP1–

TP2+

TP2–