FS2012 Series Datasheet

© 2018 Integrated Device Technology, Inc.

5

August 24, 2018

5. Electrical Characteristics

Table 4.

Electrical Characteristics

Note: See important notes at the end of the table.

Symbol

Parameter

Conditions

Minimum

Typical

Maximum

Units

Current Consumption

30

mA

Gas Flow[a], [c], [d], [d]

Gas Flow Range

FS2012-1020-NG

0.015

2

(2000)

SLPM

(SCCM)

FS2012-1100-NG

0.015

10

(10000)

SLPM

(SCCM)

Flow Accuracy

FS2012-1020-NG; 0.2 to 2 SLPM,

at 25°C

±2

±5

% Reading

FS2012-1100-NG; 1 to 10 SLPM,

at 25°C

Analog Voltage Output

Min to Max of Flow Range

0

–

5

V

Analog Zero Offset

0.03

0.045

0.05

V

Gas Sample Rate

Per measurement

0.4096

Sec

Liquid Flow[a], [b], [c], [d], [d]

Liquid Flow

FS2012-1001-LQ

0.025

0.5

(500)

SLPM

(SCCM)

FS2012-1002-LQ

0.025

1.0

(1000)

SLPM

(SCCM)

Flow Accuracy

FS2012-1001-LQ; 25 to 500 SCCM, at

25°C

±2

±6

% Reading

FS2012-1002-LQ; 50 to 1000 SCCM, at

25°C

Analog Voltage Output

Min to Max of Flow Range

0

—

5

V

Zero Offset

0.03

0.045

0.05

V

Liquid Sample Rate

Per measurement

0.7168

Sec

[a] Direction of flow is from P1 In to P2 Out.

[b] Board circuitry is not protected from liquids.

[c] SLPM: Standard liter per minute.

[d] SCCM: Standard cubic centimeter per minute.

[e] Standard Flow Controller Reference: 25°C, 1atm.