FS2012 Series Datasheet

© 2018 Integrated Device Technology, Inc.

7

August 24, 2018

Example:

Output data = 1F 2A (hex)

Then = (1F + 2A) = 1F2A = 7978 (decimal)

Flow (Liquid) = 7978/10 = 797.80 SCCM

9. Analog Output

The voltage output is ratiometric to the full scale span. Use the following conversion for the range examples.

Gas (SLPM)



0 to 2 SLPM: Flow = 0.4



0 to 10 SLPM: Flow = 2

Liquid (SCCM)



0 to 500 SCCM: Flow = 100



0 to 1000 SCCM: Flow = 200

Figure 2. Analog Output Example