MPX5500

Rev 6, 05/2005

Freescale Semiconductor

Technical Data

© Freescale Semiconductor, Inc., 2005. All rights reserved.

Integrated Silicon Pressure Sensor

On-Chip Signal Conditioned,

Temperature Compensated and

Calibrated

The MPX5500 series piezoresistive transducer is a state-of-the-art monolithic

silicon pressure sensor designed for a wide range of applications, but particularly

those employing a microcontroller or microprocessor with A/D inputs. This

patented, single element transducer combines advanced micromachining

techniques, thin-film metallization, and bipolar processing to provide an accurate,

high level analog output signal that is proportional to the applied pressure.

Features

•

2.5% Maximum Error over 0

° to 85°C

•

Ideally suited for Microprocessor or Microcontroller-Based Systems

•

Patented Silicon Shear Stress Strain Gauge

•

Durable Epoxy Unibody Element

•

Available in Differential and Gauge Configurations

ORDERING INFORMATION

Device

Type

Options

Case

Type

MPX Series

Order Number

Device Marking

Basic Element

Differential

867

MPX5500D

MPX5500D

Ported Elements

Differential Dual Ports

867C MPX5500DP

MPX5500DP

MPX5500

SERIES

INTEGRATED

PRESSURE SENSOR

0 to 500 kPa (0 to 72.5 psi)

0.2 to 4.7 V Output

1. Pins 4, 5, and 6 are internal device

connections. Do not connect to external

circuitry or ground. Pin 1 is noted by the

notch in the lead.

1

4

N/C

2

GND

5

N/C

3

6

N/C

MPX5500D

CASE 867-08

MPX5500DP

CASE 867C-05

Figure 1. Fully Integrated Pressure Sensor Schematic

Sensing

Element

Thin Film

Temperature

Compensation

and

Gain Stage #1

Gain Stage #2

and

Ground

Reference

Shift Circuitry

GND

Pins 4, 5, and 6 are NO CONNECTS