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MPXM2010 数据表(PDF) 3 Page - Freescale Semiconductor, Inc

部件名 MPXM2010
功能描述  10 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors
PDF  9 Pages
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制造商  FREESCALE [Freescale Semiconductor, Inc]
网页  http://www.freescale.com
标志 FREESCALE - Freescale Semiconductor, Inc

MPXM2010 数据表(HTML) 3 Page - Freescale Semiconductor, Inc

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Sensors
Freescale Semiconductor
3
MPXM2010
LINEARITY
Linearity refers to how well a transducer's output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or
(2) a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user.
Freescale's specified pressure sensor linearities are based
on the end point straight line method measured at the
midrange pressure.
Table 2. Operating Characteristics (VS = 10 Vdc, TA = 25°C.)
Characteristic
Symbol
Min
Typ
Max
Unit
Pressure Range(1)
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
POP
0—
10
kPa
Supply Voltage(2)
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.
VS
—10
16
Vdc
Supply Current
Io
—6.0
mAdc
Full Scale Span(3)
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at
the minimum rated pressure.
VFSS
24
25
26
mV
Offset(4)
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
Voff
–1.0
1.0
mV
Sensitivity
∆V/∆P—
2.5
mV/kPa
Linearity(5)
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the
specified pressure range.
• Temperature Hysteresis:
Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential
pressure applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from
the minimum or maximum rated pressure, at 25
°C.
• TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85
°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85
°C,
relative to 25
°C.
–1.0
1.0
%VFSS
Pressure Hysteresis(5) (0 to 10 kPa)
——
±0.1
%VFSS
Temperature Hysteresis5 (–40
°C to +125°C)
——
±0.5
%VFSS
Temperature Effect on Full Scale Span(5)
TCVFSS
–1.0
1.0
%VFSS
Temperature Effect on Offset(5)
TCVoff
–1.0
1.0
mV
Input Impedance
Zin
1000
2550
Output Impedance
Zout
1400
3000
Response Time(6) (10% to 90%)
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
tR
—1.0
ms
Warm-Up
——
20
ms
Offset Stability(7)
7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
——
±0.5
%VFSS



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