Sensors

4

Freescale Semiconductor

MPXM2010

Figure 2. Linearity Specification Comparison

ON-CHIP TEMPERATURE COMPENSATION AND CALIBRATION

characteristics of the MPXM2010 series at 25

°C. The output

is directly proportional to the differential pressure and is

essentially a straight line.

A silicone gel isolates the die surface and wire bonds from

the environment, while allowing the pressure signal to be

transmitted to the silicon diaphragm.

Figure 3. Output versus Pressure Differential

Pressure (% Full Scale)

050

100

End Point

Straight Line Fit

Least Squares Fit

Straight Line

Deviation

Offset

Least

Square

Deviation

Exaggerated

Performance

Curve

Offset

(Typical)

30

20

15

10

5

25

0

-5

kPa

PSI

2.5

0.362

5

0.725

7.5

1.09

10

1.45

MAX

TYP

MIN

Span

Range

(Typical)