System Specifications

System

Grating Period

20µm

Signal Period

20µm

System Resolution 5µm - 0.078µm in integer interpolation steps (factory set or user

programmed using MicroE SmartPrecision Software)

Linear accuracy*

Interpolation

accuracy:

Better than ± 0.12µm over any 20µm movement

Long-travel

accuracy:

±1µm accuracy available - consult MicroE

Better than ± 3µm for scales up to 130mm

Better than ±5µm for scales 155mm to 1m

Better than ±5µm per meter for scales 1m or more

*Maximum peak to peak error over the specified movement when compared to a NIST-traceable laser interferometer standard,

used at room temperature and with MicroE interpolation electronics.

Rotary Accuracy* Scale O.D.

Microradians

Arc-Seconds

12.00mm

±100

±21

19.05mm

±63

±13

31.75mm

±38

±7.8

57.15mm

±19

±3.9

107.95mm

±10

±2.1

*Based on ideal scale mounting concentricity

Sensor Size

W:

12.70mm

0.500"

L:

20.57mm

0.810"

H:

8.38mm

0.330"

Operating and Electrical Specifications

Power Supply

5VDC ±5% @ 330mA (30mA for sensor)

Temperature

Operating:

0 to 70°C

Storage:

-20 to 70°C

Humidity:

10 - 90% RH non-condensing

EMI:

CE Compliant

Shock:

1500G 0.5 ms half sine (Sensor)

Sensor Weight:

5.0g (Sensor without cable)

Cable:

Double shield. Maximum length 2m. Diameter: 3.6mm (0.142”)

Flex Life: 20 x 10

Page 5 of 10

All Specifications are subject to change. All data is

accurate to the best of our knowledge. MicroE

Systems is not responsible for errors.

Mechanical Information - Sensor

or 78.7 [2000] ±.50 [12.7]

19.7 [500] or 39.4 [1000]

.142 [3.61]

CABLE DIAMETER

1.47

.058

4.22

.166

6.91

.272

0.94

.037

3.4

.13

SENSOR MTG SURFACE

A

2.03

.080

16.5

.650

2.11

.083

3.94

.155

8.5

.334

12.70

.500

10.29

.405

20.57

.810

THRU.

2X

2.69

.106

8.75

.345

6.2

.24

B

C

SENSOR MTG. SURFACE

A