MEMS Gauge Pressure Sensor

2SMPP

37

Engineering Data (for reference)

■ Output Characteristics

Rated Pressure vs. Output Voltage

Note: 1. Ambient temperature condition: 25

°C

2. Drive current: 100

μA

3. These output voltage characteristics are measured with tester without a mounting board.

4. The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual

equipment before use.

Temperature influence of Span voltage

Temperature influence of Offset voltage

Note: 1. Measured points are 0

°C and 25°C, 50°C

2. Drive current: 100

μA

3. These output voltage characteristics are measured with tester without a mounting board.

4. The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual

equipment before use.

Rated Pressure [kPa]

−5

010

20

30

40

50

40

35

30

25

20

15

10

5

0

Temperature [°C]

−1.0

0.0

−0.5

−10

0

1020304050

60

0.5

1.0

1.5

2.0

Temperature [°C]

−2.0

−1.0

−1.5

0.0

−0.5

−10

0

1020304050

60

0.5

1.0

1.5

2.0