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FS2012 数据表(PDF) 5 Page - Integrated Device Technology

部件名 FS2012
功能描述  High Performance Flow Sensor Module
PDF  9 Pages
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制造商  IDT [Integrated Device Technology]
网页  http://www.idt.com
标志 IDT - Integrated Device Technology

FS2012 数据表(HTML) 5 Page - Integrated Device Technology

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FS2012 Series Datasheet
© 2017 Integrated Device Technology, Inc.
5
July 19, 2017
5. Electrical Characteristics
Table 4.
Electrical Characteristics
Note: See important notes at the end of the table.
Symbol
Parameter
Conditions
Minimum
Typical
Maximum
Units
IVIN
Current Consumption
30
mA
Gas Flow[a], [c], [d]
Nitrogen (N2) at Temperature = 23.5 ± 1.5°C
FNG
Gas Flow Range
FS2012-1020-NG
0
2
(2000)
SLPM
(SCCM)
FS2012-1100-NG
0
10
(10000)
SLPM
(SCCM)
ENG
Flow Accuracy
FS2012-1020-NG; 0.1 to 2 SLPM
±1
±4
% Reading
FS2012-1100-NG; 0.5 to 10 SLPM
VOUT_ANG
Analog Voltage Output
0
–
5
V
OFFZERO_NG
Analog Zero Offset
0
0.003
0.005
V
Liquid Flow[a], [b], [c], [d]
DI Water at Temperature = 23.5 ± 1.5°C
FLQ
Liquid Flow
FS2012-1001-LQ
0
0.5
(500)
SLPM
(SCCM)
FS2012-1002-LQ
0
1.0
(1000)
SLPM
(SCCM)
ELQ
Flow Accuracy
FS2012-1001-LQ; 20 to 450 SCCM
±2.5
±7
% Reading
FS2012-1002-LQ; 20 to 800 SCCM
VOUT_ALQ
Analog Voltage Output
0
—
5
V
OFFZERO_LQ
Zero Offset
0
0.003
0.005
V
[a] Direction of flow is from P1 In to P2 Out.
[b] Board circuitry is not protected from liquids.
[c] SLPM: Standard liter per minute.
[d] SCCM: Standard cubic centimeter per minute.



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