FS2012 Series Datasheet

© 2017 Integrated Device Technology, Inc.

9

July 19, 2017

11. Ordering Information

Note: The part code depends on the application. In the part code, NG refers to “non-corrosive gas” and LQ refers to “liquid.”



For NG parts, the calibration gas is nitrogen. Other calibration gases are available on request.



For LQ parts, the calibration fluid is DI water.

Orderable Part Number

Description and Package

Shipping Packaging

Temperature

FS2012-1020-NG

0 to 2 SLPM calibrated gas flow sensor mounted on a circuit

Box

0°C to +85°C

FS2012-1100-NG

0 to 10 SLPM calibrated gas flow sensor mounted on a circuit

Box

0°C to +85°C

FS2012-1001-LQ

0 to 0.5 SLPM (500 SCCM) calibrated liquid flow sensor

analog output

Box

0°C to +85°C

FS2012-1002-LQ

0 to 1.0 SLPM (1000 SCCM) calibrated liquid flow sensor

analog output

Box

0°C to +85°C

12. Revision History

Revision Date

Description of Change

July 19, 2017

Initial release of the preliminary datasheet.

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