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FS2012 数据表(PDF) 7 Page - Integrated Device Technology |
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FS2012 数据表(HTML) 7 Page - Integrated Device Technology |
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7 / 9 page ![]() FS2012 Series Datasheet © 2017 Integrated Device Technology, Inc. 7 July 19, 2017 9. Analog Output The voltage output is ratiometric to the full scale span. Use the following conversion for the range examples. Gas (SLPM) 0 to 2 SLPM: Flow = 0.4 Output (V) 0 to 10 SLPM: Flow = 2 Output (V) Liquid (SCCM) 0 to 500 SCCM: Flow = 100 Output (V) 0 to 1000 SCCM: Flow = 200 Output (V) Figure 2. Analog Output Example |
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