SCA61T Series

VTI Technologies Oy

Subject to changes

1/18

www.vti.fi

Doc. nr. 8261900

Rev.A

Sensing

element

SPI interface

Self test 1

Signal conditioning

and filtering

A/D conversion

EEPROM

calibration

memory

6 ST

8 VDD

4 GND

7 OUT

1 SCK

2 MISO

3 MOSI

5 CSB

Temperature

Sensor

THE SCA61T INCLINOMETER SERIES

The SCA61T Series is a 3D-MEMS-based single axis inclinometer family that provides instrumentation grade

performance for leveling applications. Low temperature dependency, high resolution and low noise together with

robust sensing element design make the SCA61T ideal choice for leveling instruments. The VTI inclinometers are

insensitive to vibration, due to their over damped sensing elements and can withstand mechanical shocks of

20000 g.

Features

•

Measuring ranges ±30° SCA61T-FAHH1G

and ± 90° SCA61T-FA1H1G

•

0.0025° resolution (10 Hz BW, analog output)

•

Sensing element controlled over damped

frequency response (-3dB 18Hz)

•

Robust design, high shock durability (20000g)

•

Excellent stability over temperature and time

•

Single +5 V supply

•

Ratiometric analog voltage outputs

•

Digital SPI inclination and temperature output

•

Comprehensive failure detection features

o

True self test by deflecting the sensing

elements’ proof mass by electrostatic force.

o

Continuous sensing element interconnection

failure check.

o

Continuous memory parity check.

•

RoHS compliant

•

Compatible with Pb-free reflow solder process

Applications

•

Platform leveling and stabilization

•

Leveling instruments

•

Acceleration and motion measurement

Figure 1.

Functional block diagram

Data Sheet