Datasheet

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9. NBTI/PBTI Package

The 4200-BTI-A package combines advanced DC I-V and ultra-fast I-V measurement capabilities of Keithley with automatic test executive

software to provide the most advanced NBTI/PBTI test platform available in the semiconductor test industry.

4200-BTI-A Ultra-fast NBTI/PBTI

The 4200-BTI-A package includes all the instruments, interconnects, and software needed to make the most sophisticated NBTI and PBTI

measurements on leading-edge silicon CMOS technology.

Model 4200-BTI-A

Offers the best high-speed, low-current measurement sensitivity available in a single-box integrated solution.

Ensures that source/measure instrumentation will not be the limiting factor when making low-level

measurements.

The ACS software, which is provided in the package, supports building complex test sequences, including

up to 20 measurement sequences and full prober integration. It also:

• Easily integrates DC I-V and ultra-fast I-V measurements into a pre- and post-stress

measurement sequence.

• Characterizes degradation and recovery behaviors using either AC or DC stress.

• Incorporates single pulse charge trapping (SPCT) measurements into longer stress-measure

sequences.

4200-BTI-A Ultra-fast NBTI/PBTI includes:

(1) 4225-PMU Ultra-Fast I-V Module

(2) 4225-RPM Remote Preamplifier/Switch Modules

Automated Characterization Suite (ACS) Software

Ultra-Fast BTI Test Project Module

Cabling

SMU1

SMU5

SMU6

SMU7

SMU8

SMU2

SMU3

SMU4

Example of using eight SMUs to stress 20 devices in parallel for HCI and NBTI. A separate ground unit (GNDU) is used for common terminals.