4225-RPM datasheet(8/45 Pages) TEKTRONIX

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4200A-SCS Parameter Analyzer

Very-low Frequency C-V Technique with SMUs

The 4200A-SCS offers the unique ability to perform

very-low frequency capacitance-voltage measurements

without an LCR meter or capacitance module. Low

frequency C-V measurements are used to characterize

the slow trapping and de-trapping phenomenon in some

materials.

Very low frequency C-V measurements with SMUs and preamps.

The 4200A-SCS uses a new narrow-band technique

that takes advantage of the low current measurement

capability of the integrated SMU instruments to perform

C-V measurements at specified low frequencies in the

range of 10 mHz to 10 Hz. This approach uses the

4200A-SCS’s SMUs with preamplifiers; no additional

hardware or software is required.

Local Switching Options

To accommodate switching between I-V and other

measurement types, the 4200A-SCS offers several

options for switching easily between measurement types:

• 4200A-CVIV Multi-Switch Module – up to four

channels that effortlessly switch between I-V and C-V

measurements. In addition, the C-V measurements can

be moved around the device under test without lifting

the prober needles or changing the test setup.

• 4225-RPM Remote Preamplifier/Switch Module acts

as a multiplexer switch that automatically switches

between precision DC SMUs, C-V, and the ultra-fast

pulsed I-V instruments. In addition, the RPM extends

the low current measurement capability of the 4225-

PMU Ultra-fast Pulsed I-V Instrument Module.

3. Capacitance-Voltage Unit (CVU)

Capacitance-voltage (C-V) measurements are often used

to characterize a MOSFET’s gate oxide thickness, oxide

defect density, doping profiles, etc. In this measurement,

as the gate voltage varies, the capacitance of the

gate to the drain and source changes. Capacitance

measurements are typically made using an AC technique.

The multi-frequency C-V instrument module measures AC

impedance by applying a DC bias voltage and sourcing an

AC voltage across the device under test (DUT) and then

measuring the resultant AC current and phase angle.

AC Measurements from 1 kHz – 10 MHz

The 4210-CVU instrument module performs multi-

frequency capacitance measurements from femtofarads

(f F) to microfarads (μF) at test frequencies from 1 kHz to

10 MHz and while providing a DC bias voltage of up to

±30 V or 60 V differential.

Capacitance-Voltage sweeps.

With up to 4096 measurement points, the CVU instrument

can be used to measure capacitance vs. voltage (C-V),

capacitance vs. frequency (C-f) and capacitance vs. time

(C-t) to extract many important parameters such as:

• Doping profiles

• T

• Carrier lifetime tests

• Junction, pin-to-pin, and interconnect capacitance

measurements

4225-RPM 数据表(PDF) 8 Page - TEKTRONIX, INC.

4225-RPM 数据表(HTML) 8 Page - TEKTRONIX, INC.

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