4225-RPM datasheet(13/45 Pages) TEKTRONIX

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6. NBTI/PBTI Package

Modeling negative/positive bias temperature instability

(NBTI/PBTI) is a challenge when developing deeply scaled

silicon CMOS transistor designs. Over time, NBTI effects

cause a transistor’s threshold voltage (V

T) to shift and

its sub-threshold drain current to increase significantly,

severely limiting transistor lifetime and circuit performance.

These effects must be accurately modeled during device

development and monitored during process integration

and production. During BTI characterization, the transistor

is alternately stressed and characterized. However,

the BTI mechanism is susceptible to relaxation effects,

which means that the instant the stress is removed,

the transistor starts to recover and the degradation

fades. Characterizing the degradation prior to relaxation

demands the use of ultra-fast I-V techniques.

The 4200-BTI-A Ultra-Fast BTI Package is the

industry’s most advanced NBTI/PBTI test platform, with

everything needed to make sophisticated NBTI and

PBTI measurements on leading-edge silicon CMOS

technology: a 4225-PMU Ultra-Fast I-V Module, two

4225-RPM Remote Preamplifier/Switches, Automated

Characterization Suite (ACS) software, an Ultra-Fast

BTI Test Project Module, and cabling. The test software

module makes it easy to define stress timing, stress

conditions, and a wide range of measurement sequences

from spot I

D, On-The-Fly (OTF), or ID-VG sweeps. It allows

measuring recovery effects as well as degradation and

offers pre-stress and post-stress measurement options

that incorporate the 4200A-SCS’s DC SMUs for precision

low-level measurements.

The Ultra-Fast BTI test software module supports spot,

step sweep, smooth sweep, and sample measurement

types. Each type’s timing is defined by the test sample

rate and the individual measurement settings. The

software module also provides control over the voltage

conditions between each element in the test sequence,

for maximum flexibility and ease of use, even when

defining complex test sequences.

Ultra-fast BTI package supports spot, smooth sweep, triangle, and step sweep measurement types.

M M

M M M M M

M M M M

M M

M M M M M

300ns–

10µs

1µs–100µs

10 pts. min.

20ns–100ks

Spot

Triangle

Spot

20ns–100ks

100ns–100µs

20ns–100ks

300ns–

10µs

Same as

measure

200ns–

100µs

VG–ID Sweep

Initial/Final Meas.

VGstress

Combo

Initial/Final Meas.

Intermediate

1st Stress

2nd Stress

3rd Stress

Intermediate

VG–ID Sweep

Measurement Types

Spot

Smooth Sweep

Triangle

Step Sweep

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