Datasheet

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18

2. SMU Preamplifier Module

The low current measurement capabilities of any SMU can be extended by adding an optional 4200-PA preamplifier. The preamplifier provides 10 aA

resolution by effectively adding five current ranges to either SMU model. The preamp module is fully integrated with the system; to the user, the SMU

simply appears to have additional measurement resolution available.

4200-PA General information

Installation

Local

The preamplifier is shipped installed on the back panel of the 4200A-SCS for local operation.

Remote

Users can remove the preamplifier from the back panel and place it in a remote location (such as in a light-

tight enclosure or on the prober platen) to eliminate measurement problems due to long cables.

Input Connectors

One custom, 15 pin, D-Sub (m)

Output Connectors

Two triaxial (f)

Dimensions

0.79 in. wide × 4.4 in. deep × 2.2 in. tall (2 cm wide × 11.3 cm deep × 5.6 cm tall)

Weight

4.8 oz. (136 g)

Current

Max.

Voltage

Measure

Source

Accuracy

±(% rdg + amps)

Accuracy

±(% rdg + amps)

4210-SMU

High Power

SMU

and

4211-SMU

High Power

1 A

21 V

1 µA

0.100% + 200 µA

50 µA

0.100% + 350 µA

100 mA

210 V

100 nA

0.045% + 3 µA

5 µA

0.050% + 15 µA

4200-SMU

Medium

Power SMU

and

4201-SMU

Medium

100 mA

21 V

100 nA

0.045% + 3 µA

5 µA

0.050% + 15 µA

10 mA

210 V

10 nA

0.037% + 300 nA

500 nA

0.042% + 1.5 µA

1 mA

210 V

1 nA

0.035% + 30 nA

50 nA

0.040% + 150 nA

100 µA

210 V

100 pA

0.033% + 3 nA

5 nA

0.038% + 15 nA

10 µA

210 V

10 pA

0.050% + 600 pA

500 pA

0.060% + 1.5 nA

1 µA

210 V

1 pA

0.050% + 100 pA

50 pA

0.060% + 200 pA

100 nA

210 V

100 fA

0.050% + 30 pA

5 pA

0.060% + 30 pA

42XX-SMU with optional

4200-PA Preamp

10 nA

210 V

10 fA

0.050% + 1 pA

500 fA

0.060% + 3 pA

1 nA

210 V

1 fA

0.050% + 100 fA

50 fA

0.060% + 300 fA

100 pA

210 V

300 aA

0.100% + 30 fA

15 fA

0.100% + 80 fA

10 pA

210 V

100 aA

0.500% + 15 fA

5 fA

0.500% + 50 fA

1 pA

210 V

10 aA

1.000% + 10 fA

1.5 fA

1.000% + 40 fA

Voltage Compliance: Bipolar limits set with a single value between full scale and 10% of selected voltage range.

Notes

1. All ranges extend to 105% of full scale.

2. Specifications apply on these ranges with or without a 4200-PA.

3. Display resolution is limited by fundamental noise limits. Measured resolution is 6½ digits on each range. Source resolution is 4½ digits on each range.

4. The measurement and source accuracy are specified at the termination of the supplied cables.

• 23°C ±5°C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes of warmup.

• Speed set to NORMAL.

• Guarded Kelvin connection.