Datasheet

TEK.COM

16

Max. Current

Measure

Source

4200-SMU and

4201-SMU

4210-SMU and

4211-SMU

Accuracy

±(% rdg + volts)

Accuracy

±(% rdg + volts)

200 V

10.5 mA

105 mA

200 µV

0.015% + 3 mV

5 mV

0.02% + 15 mV

20 V

105 mA

1.05 A

20 µV

0.01% + 1 mV

500 µV

0.02% + 1.5 mV

2 V

105 mA

1.05 A

2 µV

0.012% + 150 µV

50 µV

0.02% + 300 µV

200 mV

105 mA

1.05 A

0.2 µV

0.012% + 100 µV

5 µV

0.02% + 150 µV

Current Compliance: Bipolar limits set with a single value between full scale and 10% of selected current range.

Notes

1. All ranges extend to 105% of full scale.

2. Specifications apply on these ranges with or without a 4200-PA.

3. The measurement and source accuracy are specified at the termination of the supplied cables.

• 23°C ±5°C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes of warmup.

• Speed set to NORMAL.

• Guarded Kelvin connection.

SMU Load Capacitance Specification

Current Range

Maximum Load

Capacitance between

Force HI and Force LO

terminals

Maximum Guard

Capacitance between

Force HI and Guard

terminals

Maximum Shield

Capacitance between

Guard and Force LO

terminals

4211-SMU

1 A

100 µF

5 nF

10 nF

4211-SMU or 4211-SMU

100 mA

100 µF

4201-SMU or 4211-SMU

100 nA to 10 mA

10 µF

4201-SMU or

4211-SMU with

4200-PA preamplifier

1 nA to 10 nA

10 µF

1 pA to 100 pA

1 µF

Voltage Monitor Mode

High impedence voltmeter mode set at 0 Amps.

Accuracy & Resolution

Voltage Range

Measure Resolution

Measure Accuracy

±(%rdg + volts)

200 V

200 µV

0.015% + 3 mV

20 V

20 µV

0.01% + 1 mV

2 V

2 µV

0.012% + 110 µV

200 mV

0.2 µV

0.012% + 80 µV

Input Impedance

Input Leakage Current

<30 pA

Measurement Noise

0.02% of measure range (rms).

Differential Voltage Monitor

Use two SMUs in VMU mode or use the low sense terminal provided with each SMU.