4225-RPM datasheet(1/45 Pages) TEKTRONIX

部件名	4225-RPM

功能描述	4200A-SCS Parameter Analyzer

PDF	45 Pages

Scroll/Zoom	100%

制造商	TEKTRONIX [TEKTRONIX, INC.]

网页	https://www.tek.com/

标志

1 / 45 page

See your innovations come to life. The 4200A-SCS is a

customizable and fully-integrated parameter analyzer

that provides synchronized insight into current-voltage

(I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V

characterization. The highest performance parameter

analyzer, the 4200A-SCS accelerates semiconductor,

materials, and process development.

The 4200A-SCS ClariusTM GUI-based Software provides

clear, uncompromised measurement and analysis

capability. Furnished with embedded measurement

expertise and hundreds of ready-to-use application

tests, Clarius Software enables you to dig deeper into

your research with speed and confidence.

The 4200A-SCS Parameter Analyzer is completely

customizable and fully upgradable, so you can add the

instruments you need now – or later. With the 4200A-SCS

Parameter Analyzer, making connections to your bold

discoveries has never been easier.

Key Performance Specifications

I-V Source Measure Unit (SMU)

• ±210 V/100 mA or ±210 V/1 A modules

• 100 fA measure resolution

• 10 aA measure resolution with optional preamp

• 10 mHz – 10 Hz very low frequency capacitance

measurements

• 100 µF load capacitance

• 4-quadrant operation

• 2 or 4-wire connections

C-V Multi-frequency Capacitance Unit (CVU)

• AC impedance measurements (C-V, C-f, C-t)

• 1 kHz – 10 MHz frequency range

• ±30 V (60 V differential) built-in DC bias, expandable

to ±210 V (420 V differential)

• Simple switching between I-V and C-V

measurements with the optional CVIV Multi-Switch

Pulsed I-V Ultra-fast Pulse Measure Unit (PMU)

• Two independent or synchronized channels of

high-speed pulsed I-V source and measure

• 200 MS/s, 5 ns sampling rate

• ±40 V (80 V

p-p ), ±800 mA

• Transient waveform capture mode

• Arbitrary waveform generator for multi-level pulse

waveform with 10 ns programmable resolution

High Voltage Pulse Generator Unit (PGU)

• Two channels of high-speed pulsed V source

• ±40 V (80 V

p-p ), ±800 mA

• Arbitrary waveform generator Segment ARB®

mode for multi-level pulse waveform with 10 ns

programmable resolution

I-V/C-V Multi-Switch Module (CVIV)

• Easily switch between I-V and C-V measurements

without re-cabling or lifting prober needles

• Move the C-V measurement to any terminal without

re-cabling or lifting prober needles

• ±210 V DC bias capable

Remote Preamplifier/Switch Module (RPM)

• Automatically switches between I-V, C-V, and

ultra-fast pulsed I-V measurements

• Extends current sensitivity of the 4225-PMU

to tens of picoamps

• Reduces cable capacitance effects

4200A-SCS Parameter Analyzer

Datasheet

WINDOWS

10

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