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MPXM2102AS 数据表(PDF) 35 Page - Motorola, Inc |
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MPXM2102AS 数据表(HTML) 35 Page - Motorola, Inc |
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35 / 670 page ![]() 1–29 Motorola Sensor Device Data www.motorola.com/semiconductors REFERENCE (1) Theresa Maudie, Testing Requirements and Reliability Issues Encountered with Micromachined Structures, Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems, Eds. D. Denton, P.J. Hesketh and H. Hughes, ECS, vol. 95–27 (1995) pp. 223–230. (2) Arne Nakladal et al., Influences of Humidity and Mois- ture on the Long–Term Stability of Piezoresistive Pres- sure Sensors, Measurement, vol. 16 (1995) pp. 21–29. (3) Marin Nese and Anders Hanneborg, Anodic Bonding of Silicon to Silicon Wafers Coated with Aluminum, Silicon Oxide, Polysilicon or Silicon Nitride, Sensors and Actuators A, vol. 37–38 (1993) pp. 61–67. (4) Janusz Bryzek, Micromachines on the March, IEEE Spectrum, May 1994. (5) J. M. Hu, Physics–of–Failure–Based Reliability Qualifi- cation of Automotive Electronics, Communications in RMS, vol. 1, no. 2 (1994) pp. 21–33. (6) Michael Pecht et.al., Quality Conformance and Qualifi- cation of Microelectronics Packages and Intercon- nects, John Wiley & Sons, Inc., 1994. (7) William M. Alvino, Plastics for Electronics, McGraw– Hill, 1995 (8) Eugene R. Hnatek, Integrated Circuit Quality and Reli- ability, Marcel Dekker, Inc., 1987. (9) Charles A. Harper, Handbook of Plastics, Elastomers, and Composites, McGraw–Hill, 1992. (10) Richard W. Hertzberg, Deformation and Fracture Mechanics of Engineering Materials, John Wiley & Sons, Inc., 1983. (11) Joseph M. Giachino, Automotive Sensors: Driving Toward Optimized Vehicle Performance, 7th Int’l Con- ference on Solid State Sensor and Actuators, June 1993. (12) Perry Poiss, What Additives do for Gasoline, Hydro- carbon Processing, Feb. 1973. (13) Gasoline/Methanol Mixtures for Material Testing, SAE Cooperative Research Report CRP–001, Sep. 1990. (14) Private communication to Andrew McNeil from City of Phoenix, Water and Wastewater Department, Water Quality Division, Jan. 1994. (15) Laundry Detergents, Consumer Reports, Feb. 1991, pp. 100–106. (16) Silicon as a Mechanical Material, Kurt E. Petersen, Proc. IEEE, vol. 70, no. 5, pp. 420–457, May 1982. (17) Principles and Prevention of Corrosion, Denny A. Jones, (Prentice Hall: Englewood Cliffs, NJ, 1992). (18) Atlas of Electrochemical Equilibria in Aqueous Solu- tions, M. Pourbaix, (Pergamon Press: Oxford, Eng- land, 1966) (19) Anisotropic Etching of Crystalline Silicon in Alkaline Solutions, Part I. Orientation Dependence and Behav- ior of Passivation Layers, H. Seidel et al., J. Electro- chem. Soc., vol. 137, no. 11 (1990) pp. 3612–3625. (20) Anisotropic Etching of Crystalline Silicon in Alkaline Solutions, Part II. Influence of Dopants, H. Seidel et al., J. Electrochem. Soc., vol. 137, no. 11 (1990) pp. 3612–3625. (21) Principles of Polymer Systems, 2nd ed., F. Rodriguez, (Hemisphere Publishing Corporation: Washington, D.C., 1982. (22) D. J. Monk, Pressure Leakage through Material Inter- faces in Pressure Sensor Packages, Sensors in Elec- tronic Packaging, Eds. Charles Ume and Chao Pin–Yeh, MED–Vol. 3/EEP–Vol.14 (1995) pp. 87–93. (23) Paul A. Tobias and David C. Trindade, Applied Reli- ability, Van Nostrand Reinhold, 1995. (24) Wayne Nelson, Accelerated Testing, John Wiley & Sons, Inc., 1990. (25) O. Hallberg and D. S. Peck, “Recent Humidity Accel- erations, A Base for Testing Standards,” Quality and Reliability Engr. International, Vol. 7, pp 169–180, 1991. Freescale Semiconductor, Inc. For More Information On This Product, Go to: www.freescale.com |
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